Hyflon® AD

Specialty amorphous perfluoropolymer for semicon and membrane applications

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Hyflon® AD is a family of amorphous perfluoropolymers which resemble semi-crystalline ones in their performance properties.

Key features

  • High temperature stability
  • Good chemical resistance
  • Excellent hydrophobicity
  • Very low surface energy
  • Low dielectric constant
  • Very high gas permeability and selectivity
  • Outstanding optical properties (e.g. high UV transmittance, low refractive index)

Processing Guidelines – Updated 21 July, 2017

A key distinctive feature of Hyflon® AD polymers is their solubility in selected fluorinated solvents such as perfluoropolyethers (Galden® PFPE) and hydrofluoroethers. A wide range of solution-based coating technologies can be applied to obtain very uniform and thin films of Hyflon® AD with thicknesses even lower than 1 micron. Being the drying temperature of fluorinated solvents well below the typical baking temperatures of semi-crystalline perfluoropolymers, the coating of Hylon® AD requires mild thermal treatments which are compatible with thermo-sensitive substrates and materials.

Perfluoropolyethers lubricants (Fomblin® PFPE) and their functionalized derivatives (Fluorolink® PFPE) can be easily dissolved or dispersed in Hyflon® AD solutions to tailor their mechanical, chemical and surface properties. Some examples are here reported:

  • Elastic modulus of Hyflon® AD films can be lowered by exploiting the plasticizing effect of PFPEs
  • Surface behavior of can be tuned from almost ultrahydrophobic (by addition of Fomblin® PFPE) to wettable film (by addition of Fluorolink® PFPE)
  • Fluorolink® PFPE functional groups can be exploited both to facilitate the interaction with substrates, e.g. promoting film-to-substrate adhesion, and to improve the compatibility with other chemicals or polymers
  • Hyflon® AD film optical properties of the, e.g. the UV absorbance, can be tuned by the addition of Fluorolink® PFPE
  • Fluorolink® PFPE functional groups of can be used for chemical modifications and to introduce new and specific functionalities in Hyflon® AD films

Applications

Semiconductors

Hyflon® AD is used in the production of pellicles for electronics (microlithography), thanks to its unique properties:

  • Outstanding optical properties
  • Very low surface energy
  • Very low dielectric constant
  • Ability to provide uniform and thin films or coatings down to submicron thicknesses
  • Suitability for solution process technologies (spray, casting and spin coating)
  • Solubility in perfluorinated solvents (low solution viscosity)

Membranes

Hyflon® AD is suitable for the realization of membranes for gas separation thanks to:

  • Very high gas permeability and selectivity
  • Excellent hydrophobicity
  • High temperature stability
  • Ability to provide uniform and thin films or coatings down to submicron thicknesses
  • Suitability for solution process technologies (spray, casting and spin coating)
  • Solubility in perfluorinated solvents (low solution viscosity)

Typical Properties

Property AD 40AD 60
Densityg/cm31.981.93
Tg°C95125
Refractive index 1.3311.327

Data Sheets

Hyflon® AD Product Grades
Hyflon® AD 40H
Hyflon® AD 40L
Hyflon® AD 60