Hyflon® AD

Specialty amorphous perfluoropolymer for semicon and membrane applications

Hyflon® AD is a family of amorphous perfluoropolymers which resemble semi-crystalline ones in their performance properties.

Key features

  • High temperature stability
  • Good chemical resistance
  • Excellent hydrophobicity
  • Very low surface energy
  • Low dielectric constant
  • Very high gas permeability and selectivity
  • Outstanding optical properties (e.g. high UV transmittance, low refractive index)

Processing

A key distinctive feature of Hyflon® AD polymers is their solubility in selected solvents. In particular, their high solubility in perfluorinated solvents and their low solution viscosities make Hyflon® AD suitable for solution process technologies.

Hyflon® AD can provide uniform and thin films or coatings (down to submicron thicknesses) by casting or coating techniques and thermal treatments, well below the typical baking temperatures of semi-crystalline perfluoropolymers.

Applications

Semiconductors

Hyflon® AD is used in the production of pellicles for electronics (microlithography), thanks to its unique properties:

  • Outstanding optical properties
  • Very low surface energy
  • Very low dielectric constant
  • Ability to provide uniform and thin films or coatings down to submicron thicknesses
  • Suitability for solution process technologies (spray, casting and spin coating)
  • Solubility in perfluorinated solvents (low solution viscosity)

Membranes

Hyflon® AD is suitable for the realization of membranes for gas separation thanks to:

  • Very high gas permeability and selectivity
  • Excellent hydrophobicity
  • High temperature stability
  • Ability to provide uniform and thin films or coatings down to submicron thicknesses
  • Suitability for solution process technologies (spray, casting and spin coating)
  • Solubility in perfluorinated solvents (low solution viscosity)

Typical Properties

Property AD 40AD 60
Densityg/cm31.981.93
Tg°C95125
Refractive index 1.3311.327

Data Sheets

Hyflon® AD Product Grades
Hyflon® AD 40H
Hyflon® AD 40L
Hyflon® AD 60