Phosphoric Acid is highly selective in etching Si3N4 instead of SiO2. In combination with INTEROX® hydrogen peroxide and water, it is used to etch aluminium and InGaAs selective to InP. Electronic Grade Phosphoric Acid is manufactured in Bernburg, Germany. It is tailored to the needs of the electronic industry with a focus on the wet processing steps in the manufacture of semiconductor wafers.


  • CAS number
  • Global Business Unit
    Special Chem
  • Synonyms
    H3PO4;orthophosphoric acid


Segments Applications
Green & Sustainable Solutions Electronics, strippers & cleaners
Process Efficiency Fab Process Material
Enhanced Design & Connectivity Semiconductors & memory

Chemical categories

Chemical category Chemical family Chemical product
Phosphorus Specialties Phosphoric Acids and Salts Phosphoric Acid

Region of commercial availability

  • Europe / Middle East / Africa

Download documentation for PHOSPHORIC ACID 85 % Grade 2