PHOSPHORIC ACID 85 % Grade 2
Phosphoric Acid is highly selective in etching Si3N4 instead of SiO2. In combination with INTEROX® hydrogen peroxide and water, it is used to etch aluminium and InGaAs selective to InP.
Electronic Grade Phosphoric Acid is manufactured in Bernburg, Germany. It is tailored to the needs of the electronic industry with a focus on the wet processing steps in the manufacture of semiconductor wafers.
Identity
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CAS number7664-38-2
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Global Business UnitSpecial Chem
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SynonymsH3PO4;orthophosphoric acid
Markets
Segments | Applications |
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Green & Sustainable Solutions | Electronics, strippers & cleaners |
Process Efficiency | Fab Process Material |
Enhanced Design & Connectivity | Semiconductors & memory |
Chemical categories
Chemical category | Chemical family | Chemical product |
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Phosphorus Specialties | Phosphoric Acids and Salts | Phosphoric Acid |
Region of commercial availability
- Europe / Middle East / Africa