Fluid Handling Systems

Delivery, storage, filtration and processing are some of the steps integral to a fluid handling system. Fluoropolymers, thanks to their superior capabilities to withstand extreme chemicals and temperatures, are widely used as coatings and/or lining materials in semiconductor operations. Solef® PVDFHalar® ECTFEHyflon® PFAAlgoflon® PTFE are specified for key components such as: valves, fittings, pipe, tanks, vessels, membranes, and heat exchangers.

Process Exhaust Ducting

Halar® ECTFE delivers exceptional results in semiconductor environments. It is used as a coating and/or lining material in exhaust duct, vessels and process equipment. Halar® ECTFE powder coatings have been used successfully for fire safety and corrosion protection of exhaust duct systems that must meet the FM4922 fire safety standard. Halar® ECTFE coated ductwork offers exceptional surface smoothness reducing the risk of contamination buildup and corrosion.

 

Waste Disposal

The transfer of wastes in the semiconductor manufacturing environment concerns the transportation of chemicals, gases, slurries and other liquids from the manufacturing operations to facilities where they may be collected, pretreated, recycled or otherwise disposed of.

The substances considered waste products of semiconductor manufacturing are likely to be corrosive, ignitable, reactive and/or toxic. Fluoropolymers offer superior strength and resistance to acids used in the etch, stripping and cleaning processes, as well as abrasion resistance to slurries and effluents. Piping and fittings, valves and other components made or coated by Solef® PVDFHalar® ECTFEHyflon® PFA and Algoflon® PTFE  offer reliable construction for waste disposal systems.

Thermal shock testing is performed to check the resistance of electronic devices to extreme changes in temperature. The test is carried out by alternately dipping the devices in liquids maintained at two different temperatures.

For military applications thermal shock test is performed as specified in MIL STD 883 method 1011 or MIL STD 202 method 107.

Traditionally two different fluids can be used in the hot and cold bath, but this practice presents several disadvantages.

Galden® PFPE fluids can operate at very low as well as elevated temperatures, and their Single Fluid System is an advantageous alternative to the Dual Fluid Solution.

A single fluid for both baths allows for a dramatic decrease in operating costs by decreasing fluid consumption, reducing equipment downtime, eliminating cross contamination and reducing inventory to a single product.

Galden® PFPE D02TS and D03 are the single fluids which can successfully replace a dual fluid system.

Galden® PFPE D02TS is proposed for all military applications; it meets MIL STD 883 and MIL STD 202 while for all non-military applications Galden® PFPE D03 may be suitable.

Galden® PFPE Fluids for Thermal Shock Testing Conforming to MIL STD 883

Test Condition Hot Step 
[°C]
Cold Step 
[°C]
Hot Bath 
Fluid
Cold Bath 
Fluid
B +125 -55 D02 
D02TS
DET 
D02TS
C +150 -65 D02 
D02TS
DET 
D02TS
D +200 -65 D05 DET
E +150 -195 D02 
D02TS
Liquid N2
F +200 -195 D05 Liquid N2

Electronic devices must be completely sealed to avoid permeation by moisture and potential damage to the electrical response of the silicon chip. To guarantee the hermeticity of devices, a leak test procedure is defined by MIL STD 883, MIL STD 750 and MIL STD 202.

Galden® PFPE fluids, extremely inert and residue free, are ideal and widely used as detector and indicator fluids in leak test procedures.

Galden® PFPE DET are detector fluids specifically designed for high reliability measures. Thanks to its perfect balance between low and high boilers components, can readily detect large and small leaks. High boilers enter through large leaks and remain liquid until the test is performed while low boilers can easily penetrate into small leaks.

Galden® PFPE D02 and D03 are low consumption indicator fluids which can be advantageously used as indicator fluids respectively in military and non-military applications thanks to their higher boiling point and lower vapor pressure at test temperature.

 

Galden® PFPE Fluids for Gross Leak Test Conforming to MIL STD

Fluid Type Type I 
Detector
Type II 
Indicator
Type III 
Detector
Test Condition C1, C3 C1 E
Galden® Fluids DET D02 DET

Electronic devices must be completely sealed to avoid penetration by moisture and potential damage of the electrical response of the silicon chip. To guarantee the hermeticity of devices, a leak test procedure has been defined and ruled by MIL STD 883, MIL STD 750 and MIL STD 202.

Galden® PFPE fluids, extremely inert and residue free, are ideal and widely used as detector and indicator fluids in leak test procedures.

Galden® PFPE DET, the detector fluid specifically designed for high reliability methods thanks to its perfect balance between low and high boiler components, can easily detect large and small leaks. High boilers enter through large leaks and remain liquid until the test is performed while low boilers can easily penetrate into small leaks.

Galden® PFPE D02 and D03 are low consumption indicator fluids which can be advantageously used as indicator fluids respectively in military and non-military applications thanks to their higher boiling point and lower vapor pressure at test temperatures.

Our family of Spire® Ultra Polymers offers a combination of superlative performance properties, including high strength and stiffness at elevated temperature, dimensional stability, and resistance to chemicals, fatigue and wear, as well as compatibility with high-temperature processing. 

These ultra-performance plastics can be used throughout the semiconductor industry where dimensional stability, wear resistance, chemical resistance, and high temperature processing are required. High strength and stiffness plus long-life performance makes them an effective alternative to metal components in IC test equipment sockets and handlers.

These materials are also available in stock shapes that are readily machined to tight tolerances.

Typical Applications

  • Chip carriers
  • Test and burn-in socket components
  • Bearings
  • Bushings
  • Mechanical fasteners

 

AvaSpire® PAEK – Versatile family of products tailored to provide new and unique combinations of performance and value.

KetaSpire® PEEK – An industry standard with proven performance. It offers outstanding chemical resistance and mechanical properties up to 250°C along with low particle generation, low outgassing and best-in-class fatigue resistance.

Torlon® PAI – Combines exceptional wear resistance with high strength and stiffness up to 275°C as well as excellent resistance to creep, abrasion and chemicals. It has low thermal expansion and high dielectric properties, and is more cost-effective than machined thermoset polyimides.

Fluoropolymers meet stringent standards for chemical and temperature resistance demanded for wafer processing equipment, cleaning tools and wet benches. Halar® ECTFE is widely used as a structural material as well as in coatings for clean room exhaust duct systems. Solef® PVDF, extruded or molded, is found in fittings, valves and various components as well as in processing equipment.  Hyflon® PFA fully fluorinated polymers deliver exceptional corrosion resistance and purity for components and coatings.

Galden® PFPE fluids are widely used as heat transfer media in IC manufacturing tools such as dry etchers, ion implanters, lithography steppers, and chemical vapor deposition (CVD). Fomblin® PFPE lubricants are ideal for use as vacuum pump oils in wafer manufacturing processing such as dry etching and CVD.

Critical sealing made from Tecnoflon® FKM and FFKM ensure process reliability and long service life.

The main purpose of a process cooling fluid is to control or maintain the constant temperature of the wafer to a certain set point in order to avoid potential material damage.

Galden® PFPE HT is a line of heat transfer fluids with boiling points ranging from 55°C to 270°C. Their excellent dielectric properties, high chemical stability combined with their capacity to operate at very low as well as elevated temperatures make them the best heat transfer fluids for the aggressive conditions used in the Semiconductor and Electronic Industry.

Galden® PFPE HT fluids show excellent compatibility with most of the materials commonly present in heat exchangers. Galden® PFPE systems are practically maintenance-free with no corrosion hazard. Galden® PFPE dielectric properties do not change with use with no risk of short circuiting. Environmentally safe, Galden® PFPE is non-toxic, non-explosive, and will not damage electronics should any leakage occur. No Flash or Fire Point and No Auto-ignition Point are additional advantages of Galden® PFPE HT.

Galden® HT PFPE: Operating Temperature Range

UHB

Hyflon® AD amorphous perfluoropolymers can provide uniform and thin films or coatings down to submicron thicknesses for solution process technologies. Important characteristics for microlithography applications include:

  • High temperature stability
  • Good chemical resistance
  • Excellent hydrophobicity
  • Very low surface energy
  • Low dielectric constant
  • Very high gas permeability and selectivity
  • Outstanding optical properties (i.e. high UV transmittance, low refractive index)

Fomblin® PFPE fluorinated fluids have outstanding performance in aggressive chemical environments and where high temperatures or wide working-temperature ranges are involved. Fomblin® PFPE Y LVAC and Y HVAC grades are ideal for use in vacuum pumps as sealing and working fluids especially in those systems exposed to aggressive gases. Fomblin® PFPE Y HVAC combines narrow molecular weight range and controlled viscosity with an extremely low vapor pressure.

Chemical inertness, thermal stability up to 290°C and the possibility to provide anti-rust and wear additivation make the Fomblin® PFPE VAC product line ideal for lubrication of vacuum pumps in harsh environment including wafer processing.

 

Key features

  • Thermally stable
  • Chemically inert
  • Non-flammable
  • Non-toxic
  • Compatible with metals, hydrogenated polymers, oxygen and aggressive gases even at very high temperatures.

Learn more about Fomblin® PFPE Lubricants

Our family of Spire® Ultra Polymers offers a combination of superlative performance properties, including high strength and stiffness at elevated temperature, dimensional stability, and resistance to chemicals, fatigue and wear, as well as compatibility with high-temperature processing.

These ultra-performance plastics can be used throughout the semiconductor industry where dimensional stability, wear resistance, chemical resistance, and high temperature processing are required. High strength and stiffness plus long-life performance makes them an effective alternative to metal components in wafer handling, processing vessels, parts carriers, and IC test equipment sockets and handlers.

These materials are also available in stock shapes that are readily machined to tight tolerances.

 

Typical Applications

  • Wafer transport system components
  • Processing vessels and components
  • CMP rings
  • Diamond polishing pads

 

AvaSpire® PAEK – Versatile family of products tailored to provide new and unique combinations of performance and value.

KetaSpire® PEEK – An industry standard with proven performance. It offers outstanding chemical resistance and mechanical properties up to 250°C along with low particle generation, low outgassing and best-in-class fatigue resistance.

Torlon® PAI – Combines exceptional wear resistance with high strength and stiffness up to 275°C as well as excellent resistance to creep, abrasion and chemicals. It has low thermal expansion and high dielectric properties, and is more cost-effective than machined thermoset polyimides.

Semicon_SuperiorWearResistance