Vacuum Pump Lubrication
Fomblin® PFPE fluorinated fluids have outstanding performance in aggressive chemical environments and where high temperatures or wide working-temperature ranges are involved. Fomblin® PFPE Y LVAC and Y HVAC grades are ideal for use in vacuum pumps as sealing and working fluids especially in those systems exposed to aggressive gases. Fomblin® PFPE Y HVAC combines narrow molecular weight range and controlled viscosity with an extremely low vapor pressure.
Chemical inertness, thermal stability up to 290°C and the possibility to provide anti-rust and wear additivation make the Fomblin® PFPE VAC product line ideal for lubrication of vacuum pumps in harsh environment including wafer processing.
- Thermally stable
- Chemically inert
- Compatible with metals, hydrogenated polymers, oxygen and aggressive gases even at very high temperatures.