Wear Resistant Components
Our family of Spire® Ultra Polymers offers a combination of superlative performance properties, including high strength and stiffness at elevated temperature, dimensional stability, and resistance to chemicals, fatigue and wear, as well as compatibility with high-temperature processing.
These ultra-performance plastics can be used throughout the semiconductor industry where dimensional stability, wear resistance, chemical resistance, and high temperature processing are required. High strength and stiffness plus long-life performance makes them an effective alternative to metal components in wafer handling, processing vessels, parts carriers, and IC test equipment sockets and handlers.
These materials are also available in stock shapes that are readily machined to tight tolerances.
- Wafer transport system components
- Processing vessels and components
- CMP rings
- Diamond polishing pads
AvaSpire® PAEK – Versatile family of products tailored to provide new and unique combinations of performance and value.
KetaSpire® PEEK – An industry standard with proven performance. It offers outstanding chemical resistance and mechanical properties up to 250°C along with low particle generation, low outgassing and best-in-class fatigue resistance.
Torlon® PAI – Combines exceptional wear resistance with high strength and stiffness up to 275°C as well as excellent resistance to creep, abrasion and chemicals. It has low thermal expansion and high dielectric properties, and is more cost-effective than machined thermoset polyimides.