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(SF6) SULFUR HEXAFLUORIDE Electronic Grade

Sulfur Hexafluoride (SF6)

 

SF6-Grün-wafer

Sulfur Hexafluoride (SF6) is increasingly utilized in the manufacturing of semiconductor devices, including integrated circuits (ICs), flat panels, photovoltaic panels, and Micro-Electro-Mechanical Systems (MEMS). Its application as an etching gas is favored due to its density and large molecular size, making it particularly effective in flat panel and MEMS production processes. Fluorinated gases like SF6 play a critical role in the manufacturing of silicon devices, where gas purity is paramount to minimize contamination risks. To meet this demand, Solvay provides N5.0 grade SF6, ensuring a minimum purity level of 99.999%.

CAS number Synonyms
2551-62-4
SULPHUR HEXAFLUORIDE

Markets

Segments Applications
Energy - Power Generation
Segments Applications
Display & Lighting Technologies New Display Technologies
Semiconductor Fab Process Materials

Chemical categories

Chemical category Chemical family Chemical product
Fluorinated chemicals & fluids Fluorinated gas Sulphur hexafluoride

Region of availability

  • Not available in Africa & Middle East
  • Asia Pacific
  • Europe
  • Latin America
  • North America

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