Sulfur Hexafluoride (SF6) is more and more used for the manufacturing of semiconductor devices such as IC (integrated circuits), flat panels, photovoltaic panels and MEMS (Micro-Electro-Mechanical-Systems). SF6 is applied in the above process as an etching gas. Due to the density and large molecule size, SF6 is a prefered etching gas in flat panel and MEMS production processes. Fluorinated gases, such as Sulfur Hexafluoride (SF6), play very important roles in the manufacturing of silicon devices. Gas purity is of key importance in this market segment, because any possibility of contamination has to be minimized. For this purpose Solvay offers N5.0 material (purity min. 99.999 %)

Identity

  • CAS number
    2551-62-4
  • Synonyms
    SULPHUR HEXAFLUORIDE

Markets

Chemical categories

Chemical category Chemical family Chemical product

Region of commercial availability

  • Asia / Pacific
  • Europe / Middle East / Africa
  • North America
  • Latin America

Download documentation for (SF6) SULFUR HEXAFLUORIDE Electronic Grade