Solvaclean® is an environmentally friendly cleaning gas based on F2.
Solvaclean® N is preferably used for replacing NF3 for Applied tools.
| CAS number | Synonyms |
|---|---|
7782-41-4 7727-37-9 7440-37-1 | F2/N2/Ar;FAN gas;cleaning gas |
Markets
| Segments | Applications |
|---|---|
| Semiconductor | Fab Process Materials |
Chemical categories
| Chemical category | Chemical family | Chemical product |
|---|---|---|
| Fluorinated chemicals & fluids | Fluorinated gas | Fluorine / Nitrogen mixtures |
Region of availability
- Not available in Africa & Middle East
- Asia Pacific
- Europe
- Latin America
- North America