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Solvaclean® is an environmentally friendly cleaning gas based on F2.
Solvaclean® N is preferably used for replacing NF3 for Applied tools.
CAS number Synonyms
7782-41-4 7727-37-9 7440-37-1
F2/N2/Ar;FAN gas;cleaning gas

Product variants

  • []


Segments Applications
Semiconductor Fab Process Materials

Chemical categories

Chemical category Chemical family Chemical product
Fluorinated chemicals & fluids Fluorinated gas Fluorine / Nitrogen mixtures

Region of availability

  • Africa & Middle East
  • Asia Pacific
  • Europe
  • Latin America
  • North America

Download documents for SOLVACLEAN® N

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