(SF6) SULFUR HEXAFLUORIDE Electronic Grade

Sulfur Hexafluoride (SF6) is increasingly utilized in the manufacturing of semiconductor devices, including integrated circuits (ICs), flat panels, photovoltaic panels, and Micro-Electro-Mechanical Systems (MEMS). Its application as an etching gas is favored due to its density and large molecular size, making it particularly effective in flat panel and MEMS production processes. Fluorinated gases like SF6 play a critical role in the manufacturing of silicon devices, where gas purity is paramount to minimize contamination risks. To meet this demand, Solvay provides N5.0 grade SF6, ensuring a minimum purity level of 99.999%.