Elemental Fluorine (F2) electronic grade
For cleaning tools used in flat panel and photovoltaic production
Elemental Fluorine (F2) is used to clean CVD tools used in flat panel (LCD) and photovoltaic production from deposition within the chamber, which is caused by the CVD process.
In addition to being a more efficient cleaning gas, compared to NF3 for example, high purity F2 offers the benefit of being environmental-friendly. The GWP (Global Warming Potential) of F2 is zero compared to NF3 17900.
Fluorine Chemicals - Asia Pasific
Solvay Korea CO., LTD
Fluorine Chemicals - Europe - Middle East - Africa - South America - Asia Pacific
Solvay Fluor GmbH
Fluorine Chemicals - Japan
Nippon Solvay K.K.
Fluorine Chemicals - North America
Solvay Fluorides, LLC