Elemental Fluorine: Efficient and Eco-Friendly Cleaning for CVD Tools
Elemental Fluorine (F2) is used to clean CVD tools used in flat panel (LCD) and photovoltaic production from deposition within the chamber, which is caused by the CVD process.
In addition to being a more efficient cleaning gas, compared to NF3 for example, high purity F2 offers the benefit of being environmental-friendly. The GWP (Global Warming Potential) of F2 is zero compared to NF3 17900.
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